Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics is a research paper published in Plasma Processes and Polymers (2022). On theSindex it has a DataRank of 0. It has been cited 11 times.
Scored on demand from live citation data
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Air Force Office of Scientific Research
Grant: FA9550‐14‐1‐0002
Foundation for the National Institutes of Health
Grant: 2R42AI125006‐02A1
Defense Advanced Research Projects Agency
Grant: JPL No. 1562980
U.S. Department of Energy
Grant: DE‐SC0021718
FWCI
0.67
Citation Percentile
0.6%
Citation Trend
Fields of Study
Keywords
Sustainable Development Goals