Fabrication of 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on Insulating Substrates With Through-Wafer Interconnects Using Sacrificial Release Process is a research paper published in Journal of Microelectromechanical Systems (2020). On theSindex it has a DataRank of 0. It has been cited 27 times.
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National Institute of Health
Grant: EY028456
Defense Advanced Research Projects Agency
Grant: N6523619C8013
National Science Foundation
Grant: ECCS-1542015
FWCI
1.96
Citation Percentile
0.9%
Citation Trend
Fields of Study
Keywords