Fabrication of 128+128-Element Row–Column Addressed 2D CMUT Arrays on a Borosilicate Glass Substrate Using Anodic Bonding and Trench Isolation of the Sealing Location is a research paper published in Journal of Microelectromechanical Systems (2025). On theSindex it has a DataRank of 0.
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National Institutes of Health
Grant: R01HL159869
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