Dual-comb ranging method for simultaneously measuring the refractive index and surface spacing in a multi-lens system is a research paper published in Optics Express (2022). On theSindex it has a DataRank of 0.417. It has been cited 6 times, with 5 citing works in its 1-hop citation network.
Precise determination of the refractive index and surface spacing in multi-lens system is essential for ultra-precision system performance, such as lithography objectives with strict requirements for each lens fabrication and assembly position. Generally, the nominal value of the refractive index at a given wavelength must be known before resolving the geometric thickness of multi-lens using conventional methods, which leads to inaccurate and inconvenient measurements. We propose a method to simultaneously measure the refractive index and surface spacing in multi-lens system based on dual-comb ranging method. The precision of the thickness measurement is better than 0.18 µm, and the refractive index is better than 1.6 × 10−4. This study provides a potential solution for realizing the real-time, fast, and precise measurement of the geometric thickness and assembly position of multi-lens in lithography objectives.
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Base Score Contribution
0.292
From this paper's citation signal
Citation Network Contribution
0.125
From 3 citing papers with measurable signal
DataRank blends this paper's own citation count with the influence of the papers that cite it. Here, roughly 70% comes from its base citations and 30% from the citation network (3 citing papers contributed measurable signal).
Citers are pulled from OpenAlex sorted by cited_by_count:descand capped per paper, so when the cap binds we keep the highest-signal references and the score is reproducible across reruns.
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