Comprehensive Assessments in Bonding Energy of Plasma Assisted Si-SiO2 Direct Wafer Bonding after Low Temperature Rapid Thermal Annealing is a research paper published in Micromachines (2022). On theSindex it has a DataRank of 0.312. It has been cited 7 times.
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Base Score Contribution
0.312
From this paper's citation signal
Citation Network Contribution
0
Citation network not refreshed for this result
This paper's DataRank is currently driven only by its base citation score. Citation network data was not refreshed for this result.
Learn more about DataRank methodology →National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: CRF-20-01-NFRI
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: 20202010100020
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: 1415179040
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: 1415179069
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: 1415181071
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: 1415180221
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: 20009818
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: 20010420
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: 20019500
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: 20019473
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: P0008458
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: NRF-2020R1A6A1A03047771
National Research Council of Science & Technology (NST) grants by the Korean government (MSIP)
Grant: NK236F
Ministry of Trade, Industry and Energy
Grant: 200010420
Korea Evaluation Institute of Industrial Technology
Grant: Next-generation Intelligence semiconductor R&D Program
FWCI
0.22
Citation Percentile
0.5%
Citation Trend
Fields of Study
Keywords